Lights Out! Virtualizing the Semiconductor Ecosystem

Joseph Ervin

13:50 - 14:10

, June 8

June 8

Artificial Intelligence is a transformative technology that is forcing the semiconductor roadmap to accelerate. Chip complexity is increasing as we move from planar to 3D structures, and smaller and smaller features are making it more difficult to scale and reach yield. How will we produce the next generation of semiconductors? What will the next generation of semiconductor fabs look like?

In this talk, we will review progress toward the “fab of the future”, including where we are now and what is needed to operate a fully “lights out” fab. We’ll discuss some of the requirements of a “smart fab”, including such foundational pillars as autonomous system control, AI-powered smart tools, robotic automation, virtual (digital) twins and virtual device fabrication. We’ll also look at the vast data produced in these new smart fabs, and discuss how artificial intelligence will be a key enabling technology in operating a “lights out” facility. We’ll provide specific examples of how AI and virtual twins are being used to improve chamber productivity and yield, and how humans and AI will work together synergistically in both the physical and virtualized semiconductor fabs of the future.

About the speaker

Joseph Ervin

Dr. Joseph Ervin is the Managing Director, Product Line Head at the Semiverse® Solutions Division of Lam Research, where he is responsible for managing the product development, sales, marketing and support of Semiverse Solutions software platforms. Previously, he worked for IBM on semiconductor device and integration development at multiple research and foundry locations, including IBM, ST Microelectronics, the College of Nanoscale Science and Engineering, and at GlobalFoundries. His current position includes managing customer applications for next node semiconductor integration challenges, along with development of unique methods for modeling and solving these issues. He holds a Ph.D. in Device Physics from Arizona State University. He has over 60 patents issued and over 50 publications.